论文总字数：16400字

摘 要

本实验通过乙醇，氧化铌，四氧化三铅，二氧化钛和碳酸镁碱式五水合物作为原料，通过烧结和球磨的方式制备出铌镁酸铅（PMN-PT）初产品。随后通过三次目筛以及再球磨的方式提纯出产品，之后进行XRD测试，对其进行成份、形貌、结构的分析，得出产品制备成功的结论。然后通过匀胶机用匀胶法制备PMN-PT压电薄膜，制备过程中，选用聚偏氟乙烯(PVDF)作为基体，PMN-PT作为功能体，理由是其没有单独成膜的条件。得到的压电薄膜综合了两者的优点，具有很好的韧性以及低密度等特点^[19]。最后通过电极性能测试，加入频率这个变量测定不同比例的铌镁酸铅粉体制备薄膜的压电性能。接下来选用钛酸四丁酯、正丙醇锆和三水合乙酸铅为原料，采用溶胶凝法高温煅烧得到PZT。然后和铌镁酸铅一样通过匀胶机用匀胶法制备PZT的压电薄膜，通过电极性能测试测定不同比例的铌镁酸铅粉体制备薄膜的压电性能。

实验结果表明，PMN-PT和PZT的制备以及得到的实验成品也非常不错，这个可由形貌分析得到，制出来的压电薄膜也比较完善。PVDF膜本身具有一定的压电性能，在一定不变的频率下，通过改变PMN-PT的比例，比值越大，得到的压电薄膜的电压也会加大。

关键词：压电薄膜 PZT PMN-PT 匀胶法 压电性能

Preparation and Properties of Polymer Piezoelectric Composite Films

ABSTRACT

In this experiment, the initial product of lead magnesium niobate (PMN-PT ) was prepared by sintering and ball milling through ethanol, niobium oxide, lead tetraoxide, titania and magnesium carbonate pentahydrate as raw materials. The product was purified by three-mesh sieve and re-ball milling, followed by XRD test. The composition, morphology and structure of the product were analyzed, and the successful conclusion was obtained.Then, PMN-PT piezoelectric thin film was prepared by homogenizing method. The preparation process was carried out. PVDF was used as the matrix and PMN-PT was used as the functional substance. The reason was that it did not separate the film. The resulting piezoelectric film combines the advantages of both, with good toughness and low density and other characteristics [19]. Finally, through the electrode performance test, the frequency of the addition of this variable to determine the different proportions of magnesium niobium magnesium phosphate powder prepared by the piezoelectric properties. Next, tetrabutyl titanate, zirconium n-propoxide and lead acetate trihydrate were used as raw materials, and PZT was obtained by calcination at high temperature. Then, the piezoelectric films of PZT were prepared by homogeneous gel method with lead magnesium niobate and the piezoelectric properties of PYT films were measured by electrode performance test.

The experimental results show that the preparation of PMN-PT and PZT is very smooth, the obtained experimental product is also very good, this can be obtained by the morphology analysis, the system out of the piezoelectric film is also more perfect. PVDF film itself has a certain piezoelectric properties, at a constant frequency, by changing the PMN-PT ratio, the greater the ratio, the resulting piezoelectric film voltage will increase.

Key words: piezoelectric film, PZT, PMN-PT, glue method, piezoelectric properties

目录

摘要 I

ABSTRACT II

第一章 绪论 1

1.1 研究背景与意义 1

1.2 压电材料概述 1

1.3 PMN-PT概述 3

1.4 PZT概述 3

1.4 薄膜制备技术和镀膜技术 5

1.5 本课题研究的主要内容 6

第二章 实验部分 7

2.1 试剂与药品 7

2.2 实验仪器与设备 7

2.3 样品的制备 8

2.3.1 PMN-PT的制备 8

2.3.2 PZT粉体的制备 10

2.3.3 压电薄膜的制备 11

2.3.4 压电薄膜的性能测试 12

2.4 实验测试方法 12

第三章 结果与讨论 13

3.1 PMN-PT和PZT粉体的XRD图谱分析 13

3.1.1 PMN-PT粉体的XRD图谱分析 13

3.1.2 PZT粉体的XRD图谱分析 13

3.2 压电薄膜性能分析 14

3.2.1 PMN-PT压电性能分析 14

3.2.2 PZT压电性能分析 17

第四章 结论与展望 20

4.1 结论 20

4.2 存在的问题及展望 20

参考文献 22

致谢 23

第一章 绪论

1.1研究背景与意义

当代社会竞争激烈，科学进步发展也是日新月异，其中智能材料的发展更是重中之重。智能材料种类众多，以压电材料为首，在各行各业百花齐放。自1880年居里兄弟在石英晶体中意外发现压电效应开始，被大量学者进行广泛研究。随着电子设备从巨大，低效向着高效，精巧，之后又注重环保无害，实现产品的一代代升级换代，特别是电子计算机技术的全面发展和运用，使得高压储能陶瓷电容器的市场和需求不断增长^[6]。以铌镁酸铅（PMN）为代表的压电陶瓷材料，凭借其具有较高的介电常数，较好的压电性能，较低的容温变化率还有烧结温度等等优势而备受青睐与使用^[1]。

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