论文总字数：27649字

摘 要

等离子体是一种含有大量的电子、离子、激发态粒子、自由基和活性中性分子原子的气态物质。按照电子温度和重粒子温度的相对大小可以将等离子体分为热平衡等离子体与非平衡等离子体，其中非平衡等离子体中电子温度远大于离子温度，也被称为低温等离子体，其温度接近室温并含有大量高能活性粒子，可以在保持较低温度的情况下获得较高的化学活性，使得正常情况下难以发生的化学反应发生，因此低温等离子体在环境污染治理、医学杀菌、材料改性及流动控制等领域具有广泛的应用及并展现出其独特的优越性

低温等离子体在各种领域都有着远大的发展前进。目前，如何在大气压下通过各种反应器更高效的产生具有更多活性粒子的低温等离子体已经成为一项研究热点。为了提升高低温等离子体中的活性粒子含量，需要对反应器结构与电源参数同时进行优化。驱动电源对产生的活性粒子含量有决定性影响，所以选择合适的驱动电源对于提高等离子体产生效率和应用效果具有重要意义。近年来，通过脉冲电源驱动反应器放电产生大气压下非平衡等离子体逐步成为主流。脉冲电源驱动反应器的优势在于脉冲电压具有微秒级甚至纳秒级快速上升沿，在气体未击穿前，脉冲电压能够迅速上升至远超于发生直流击穿的电压，从而产生更强的空间电场，使得更多的能量被电子吸收，进而提升电离效率。考虑到实际应用领域产生等低温离子体的需求，本课题设计并制造一台小型微秒脉冲电源。电压能够达到25kV；脉冲频率0～5kHz；触发脉冲占空比为0~35%可调。

本课题所研究的电源，采用市电作为输入，经调压、整流、滤波模块后接在IGBT和脉冲变压器原边串联。同时，控制电路部分经过开关电源供电，利用PWM信号发生器调节控制IGBT的通断频率和导通比，以此调节滤波电容上的能量以一定频率输入到脉冲变压器原边。最后，利用脉冲变压器获得用于驱动反应器的高压脉冲，并通过驱动平板介质阻挡放电反应器和射流反应器来研究该电源的驱动能力。通过改变触发脉冲的占空比、频率，对比在不同电源参数下对反应器的驱动效果，得到较好的电源工作参数。最后，在电源的输出电路部分针对脉冲变压器噪声问题做出改进，改进了电源性能。

关键词：等离子体 微秒脉冲电源 介质阻挡放电 放电特性

Design and Discharge Characteristics of Microsecond Pulse Power Supply for High Voltage Discharge

Abstract

The plasma is a gaseous substance containing a large number of electrons, ions, excited state particles, free radicals and active neutral molecular atoms. According to the relative temperature of the electron temperature and the temperature of the heavy particles, the plasma can be divided into a thermally balanced plasma and an unbalanced plasma in which the electron temperature in the non-equilibrium plasma is much larger than the ion temperature, also known as the low temperature plasma, And contains a large number of high-energy active particles, can maintain a lower temperature in the case of high chemical activity, making the normal circumstances difficult to occur in the chemical reaction occurs, so low-temperature plasma in environmental pollution control, medical sterilization, material modification and Flow control and other fields with a wide range of applications and show its unique advantages.

Low-temperature plasma in a variety of areas have a great development forward. At present, how to produce more low-temperature plasma with more active particles through various reactors at atmospheric pressure has become a research hotspot. In order to enhance the active particles in the high and low temperature plasma, it is necessary to optimize the reactor structure and the power supply parameters at the same time. The driving power supply has a decisive influence on the content of the active particles, so it is important to select the appropriate driving power supply to improve the efficiency and application of the plasma. In recent years, non-equilibrium plasma has been gradually mainstreamed by pulsed power-driven reactor discharge at atmospheric pressure. The advantage of the pulsed power drive reactor is that the pulse voltage has a microsecond or even a nanosecond fast rising edge, and the pulse voltage can rapidly rise above the voltage at which the DC breakdown occurs before the gas is not punctured, resulting in a stronger Space electric field, so that more energy is absorbed by electrons, thereby enhancing the ionization efficiency. Taking into account the practical application of low temperature ion generation needs, the subject design and manufacture of a small microsecond pulse power. Voltage can reach 25kV; pulse frequency 0 ~ 5kHz; trigger pulse duty cycle is 0 ~ 35% adjustable.

The power of this project, the use of electricity as input, by the regulator, rectifier, filter module followed by IGBT and pulse transformer primary side in series. At the same time, the control circuit part of the power supply through the switching power supply, the use of PWM signal generator to adjust the control IGBT on-off frequency and conduction ratio, in order to adjust the energy on the filter capacitor to a certain frequency input to the pulse transformer primary side. Finally, a high-voltage pulse for driving the reactor is obtained using a pulse transformer and the drive capability of the power supply is investigated by driving the plate dielectric barrier discharge reactor and the jet reactor. By changing the duty cycle and frequency of the trigger pulse, the driving effect of the reactor under different power supply parameters is compared, and the working parameters of the power supply are obtained. Finally, the output circuit in the power supply part of the pulse transformer for noise problems to improve, improve the power performance.

Keyword：plasma; Microsecond pulse power supply; Dielectric barrier discharge ; Discharge characteristics

目 录

摘要 I

Abstract III

第一章 绪论 1

1.1 等离子气体概述 1

1.2 微秒脉冲电源 1

1.3 国内外研究现状 2

1.4 本文主要研究内容 3

第二章 电源电路设计 5

2.1 电源电路设计 5

2.1.1 整流电路 6

2.1.2 滤波电路 8

2.1.3 斩波电路 8

2.2 设计指标 12

2.3 电源工作过程 12

第三章 Matlab环境下的电源仿真 13

3.1 整流电路、滤波电路仿真 13

3.2 微秒脉冲电源的仿真 14

3.3不同参数对仿真结果的影响 16

第四章 实验与特性研究 20

4.1 电源制作 20

4.2 介质阻挡放电负载特性的研究 20

4.2.1 实验结果与仿真结果对比 22

4.2.2 实验内容 23

4.3 大气压等离子射流放电特性 31

4.3.1 射流简介 31

4.3.2 实验内容 31

4.4 电源改进 34

4.4.1 变压器等效模型 34

4.4.2 变压器绕组的影响因素和绝缘 35

4.4.3 变压器磁芯的选择 35

4.4.4 环形变压器设计 35

4.5 电源性能总结 37

第五章 总结 38

参考文献 39

致 谢 42

第一章 绪论

1.1 等离子气体概述

等离子体也叫作电浆。一些原子失去或得到电子后进行电离，形成了阳粒子或阴粒子。然后它们重新组成了一种新的带电气态物质。等离子体整体上向外不表现带电，在电磁力驱使下行动，且经常是许多等离子体一起进行活动。作为整个空间内最为普遍的一种物质，它存在于人类生活空间的每一个角落。小到随处可见的霓虹灯，大到就连黑洞边也存在着等离子体。在新时代，人类已经可以通过电场和磁场产生并驱使等离子体。

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