论文总字数：29401字

摘 要

同轴结构介质阻挡放电(Dielectric Barrier Discharge，DBD)是DBD反应器结构的一种，具有结构简单，易于实现反应器放大的优点，在工业中有着广泛的应用。目前同轴DBD普遍采用高频电源作为激励。相较于高频电源激励，脉冲电源激励产生等离子体具有能量利用率高、放电均匀性好等优点，更加适合工业大规模应用。已有研究结果表明，不同激励源类型和参数对于放电电压、电流和功率等DBD电学特性具有显著影响，而DBD电学特性直接影响低温等离子体应用效果和能量效率。因而有必要研究脉冲电源参数对于同轴DBD电学特性的影响规律，为实现激励电源参数的优化、激励电源和DBD反应器之间的匹配以及放电条件的确定提供一种新的方法和依据。

不同的激励电源的类型及电源参数对同轴DBD电学特性的影响是不同，为了探究电源参数对同轴DBD电学特性的影响，本文搭建了同轴DBD的实验平台，该平台由激励源、反应器和诊断系统组成。激励电源包括高频电源、微秒脉冲和纳秒脉冲电源三种类型，电源的幅值和频率连续可调。所采用的DBD反应器为双介质层同轴型结构，由内电极、内阻挡介质层、外阻挡介质层和外电极五个部分组成，其中内电极作为高压电极，外电极作为地电极。在诊断系统中，利用高压探头、电流线圈与示波器组成的测量系统来获取电压-电流波形与实验数据。利用该实验平台，通过测量电压与电流的波形与数据，得到了不同类型电源激励下电压与电流的关系。

为了进一步地探究不同类型的激励电源对DBD放电功率的影响，本文对同轴DBD的各部分元件进行了等效计算，分析并建立了同轴DBD的等效电路模型。并且根据其等效模型，在MATLAB平台中利用Simulink模块库建立相应的动态仿真模型。结合实验平台所测得不同激励源作用下的电压和电流波形数据，利用该仿真模型进行动态仿真分析，得到在高频电源、微秒脉冲和纳秒脉冲电源这三种不同类型电源激励下的电压、电流与功率的波形，分析研究了激励电源类型对DBD电学特性的影响。

为了探究电源参数对DBD电学特性的影响，本文利用所搭建的动态仿真模型与通过实验平台测量所得的三种类型的电源的不同电压作用的实验数据，通过仿真模型求解分析，分别得到了高频电源、微秒脉冲电源和纳秒脉冲的不同电压作用下，电压、电流和功率的波形，分析得到了不同类型激励电源的电压幅值对同轴DBD电学特性的影响。

通过仿真实验的探究，本文分析得到了激励源的类型和参数对于放电电压、电流和功率等DBD电学特性的影响，为实现激励电源和电极结构之间的最优匹配提供参考和依据。

关键词：同轴介质阻挡放电 电学特性 脉冲电源激励 等效电路模型

Study on the influence of pulse power supply parameters on the electrical properties of coaxial DBD

ABSTRACT

The coaxial structure dielectric barrier discharge (dielectric Barrier discharge,dbd) is a kind of DBD reactor structure, which has the advantages of simple structure and easy to realize the amplification of the reactor, and it is widely used in industry. At present, coaxial dbd is widely used as the excitation of high-frequency power supply. Compared with the high frequency power supply excitation, the pulsed power generation plasma has the advantages of high energy utilization and good discharge uniformity, which is more suitable for large-scale industrial applications. The results show that different excitation source types and parameters have a significant effect on the electrical properties of dbd, such as discharge voltage, current and power, and the electrical properties of DBD directly influence the application and energy efficiency of low-temperature plasma. Therefore, it is necessary to study the influence of pulse power parameters on the electrical characteristics of coaxial DBD, which provides a new method and basis for the optimization of excitation power supply parameters, the matching between excitation power supply and DBD reactor, and the determination of discharge conditions.

Different types of excitation power sources and power parameters have different effects on the electrical properties of the coaxial dbd, in order to investigate the influence of power parameters on the electrical characteristics of coaxial DBD, the experimental platform of coaxial DBD is built, which consists of excitation source, reactor and diagnostic system. The excitation power supply includes three types of high-frequency power supply, microsecond pulse and nanosecond pulse power supply, and the amplitude and frequency of power supply are adjustable continuously. The DBD reactor is a double dielectric layer coaxial type structure, comprising five parts of the inner electrode, the inner blocking medium layer, the outer blocking medium layer and the outer electrode, wherein the inner electrode is used as the high voltage electrode and the outer electrode as the earth electrode. In the diagnosis system, the voltage-current waveform and experimental data are obtained by using the measuring system composed of high voltage probe, current coil and oscilloscope. The relationship between voltage and current under excitation of different types of power supply is obtained by measuring the waveform and data of voltage and current.

In order to further explore the influence of different types of excitation power source on dbd discharge power, the equivalent circuit model of coaxial DBD is analyzed and established in this paper. According to its equivalent model, the dynamic simulation model is established by using Simulink module library in the MATLAB platform. The voltage and current waveform data of different excitation sources are measured with the experimental platform, by using the simulation model, the waveform of voltage, current and power under the excitation of three different types of power supply, such as high-frequency power supply, microsecond pulse and nanosecond pulse power supply, is obtained, and the influence of the type of excitation power source on the electrical characteristics of DBD is analyzed.

In order to investigate the influence of power parameters on the electrical properties of DBD, based on the experimental data of different voltage effects of the three types of power supply measured by the dynamic simulation model and the experimental platform, this paper obtains the different voltage effects of high-frequency power supply, microsecond pulse power supply and nanosecond pulse respectively, and Current and power waveform, the influence of voltage amplitude of different types of excitation power source on the electrical characteristics of coaxial dbd is analyzed.

In this paper, the influence of the type and parameters of the excitation source on the electrical characteristics of dbd, such as discharge voltage, current and power, is analyzed, which provides reference and basis for the optimal matching between the excitation power supply and the electrode structure.

Key words: Coaxial dielectric barrier discharge; electrical characteristics; pulse power supply excitation; equivalent circuit model

目 录

第一章 绪 论 1

1.1 DBD应用背景及其基本结构 1

1.2同轴DBD的应用及产生方式 2

1.3同轴DBD国内外研究现状 5

1.4本文研究内容 7

第二章 同轴DBD实验装置及电学特性测量方法 8

2.1实验系统及测量系统的建立 8

2.2激励电源类型及参数 9

2.3电学特性测量 10

2.4小结 12

第三章 同轴DBD动态仿真模型建立与仿真分析 13

3.1等效电气模型的建立与参数计算 13

3.2 MTALAB动态仿真模型的建立 17

3.3高频电源驱动下电学特性仿真分析 20

3.4微秒脉冲电源驱动下电学特性仿真分析 22

3.5纳秒脉冲电源驱动下电学特性仿真分析 24

3.6小结 25

第四章 驱动电源幅值对同轴DBD电学特性影响仿真分析 27

4.1不同电压幅值对高频驱动下同轴DBD电学特性的影响 27

4.2不同电压幅值对微秒脉冲驱动下同轴DBD电学特性的影响 33

4.3不同电压幅值对纳秒脉冲驱动下同轴DBD电学特性的影响 39

4.4驱动电源类型和幅值对于电学特性影响分析 45

4.5小结 45

第五章 结论 46

参考文献 47

第一章 绪 论

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