论文总字数：24000字

摘 要

冷等离子体已经被普遍应用于生产生活中。产生它的方式多种多样，目前来讲，在大气压下，介质阻挡放电生产是最常见的方法。介质阻挡放电的核心，可想而知，是供电电源。电源电压大小、频率直接影响着放电效果。为此为了能够高效地产生冷等离子体，我们就必须研制出一种与其放电效果匹配的电源。放电效果，毫无疑问，在高频率大电压下才能足够好。于是引发出我们对课题的讨论，对高频高压电源设计参数如下：(1) 单相交流输入；(2) 输出正弦波；(3) 输出频率：20kHz；(4) 输出电压：15kV。

本文电源输入为220V交流市电，经过二极管不可控整流得到310V左右含脉动成分的直流电压，然后经过DC-DC调压电路得到80V至260V的直流电压，再经过单相全桥高频逆变并通过LC无源滤波得到20kHz的高频交流电，最后通过1：100的高频变压器得到15kV高频高压电。

本文首先交代了研究背景以及高频高压电源研究现状。然后主要介绍了这种高频、高压电源的研制原理；对电源各组成模块——整流滤波电路、直流稳压电路、逆变电路、隔离升压变压器以及控制驱动电路进行分析介绍。

最后，采用目前主流的介质阻挡放电的方式，对本设计所搭建的试验样机进行了几组对比实验，分别测试了不同情况下等离子体的放电特性。

关键词： 等离子技术 介质阻挡放电 高频高压电源 IGBT

The design of high-frequency high-voltage power supply

used to produce cold plasma

Abstract

Cold plasma has been widely used in the production and life. There are so many ways to produce it, for now, Under the atmospheric pressure, dielectric barrier discharge production is the most common method. It is conceivable that the core of dielectric barrier discharge. is the power supply. The voltage and frequency of the power supply directly affects the effect of discharge. So in order to produce cold plasma efficiently, we must develop a kind of power supply which matches the discharge. The effect of discharge, no doubt, can be good enough only under the high frequency and large voltage. Then, it caused a discussion on this subject. The design parameters of the high-frequency high-voltage power supply are as follows: (1) the single-phase ac input; (2) the sine-wave output; (3) the output frequency: 20 KHZ; (4) the output voltage: 15 kV.

In this paper, the power input is 220V ac mains, when through the diode uncontrolled rectifier we will get a 310V dc voltage which contains ripple component. Then after a DC-DC voltage regulation circuit, it changes into a 80-260V dc voltage. Through a high-frequency single phase full bridge inverter with a LC passive filter, we will obtain 20kHz high-frequency ac voltage. At last, it passes through a 1:100 high-frequency transformer, and will transform into a 15kV high-frequency voltage.

At first, this paper narrates the research background as well as the research status of high-frequency high-voltage power supply. Then it mainly introduced the developing principle of this high-frequency, high-voltage power supply. It analyzes and introduces each composition module of power supply——the rectifier filter circuit, the dc voltage regulator circuit, the inverter circuit, the isolation and step-up transformer, and the drive and control circuit. Finally, using the current mainstream way of dielectric barrier discharge to do several groups of contrast experiments for the set up of the experimental prototype in this paper, respectively test the discharge characteristic of plasma under different conditions.

Key words: Plasma technology; Dielectric barrier discharge; High-frequency high-voltage power supply; IGBT

目 录

摘 要 I

Abstract II

第一章 绪 论 1

1.1 课题背景 1

1.2 高频高压电源的应用和发展 1

1.3 低温等离子体产生形式 2

1.4 本文的主要研究工作 4

第二章 主电路方案选择及其原理分析 6

2.1整流滤波电路 6

2.1.1整流电路 6

2.1.2 滤波电路 8

2.2 直流稳压电路 9

2.2.1 稳压二极管稳压电路 10

2.2.2 线性串联稳压电路 10

2.2.3 开关型稳压电路 11

2.3 逆变电路 12

2.3.1 单相半桥逆变 12

2.3.2 单相全桥逆变 13

2.4 LC滤波电路 13

2.5 主电路拓扑 14

第三章 主电路元件参数选择 16

3.1 整流二极管的选取 16

3.2 滤波电容的选取 16

3.3 Buck电路参数计算 17

3.4 逆变电路参数计算 19

3.5 LC滤波电路参数计算 19

3.6 高频高压变压器设计 20

3.6.1 高频高压变压器参数分析 21

3.6.2 变压器磁芯材料 21

3.6.3 变压器线圈绕组的计算 22

第四章 控制及保护电路设计 23

4.1 脉宽调制原理 23

4.2 控制、保护电路概述 24

4.3 控制核心TMS320F28335 24

4.4 采样电路设计 25

4.5 信号调理电路 26

4.6 故障保护电路 27

4.7 电平转换电路 29

第五章 仿真及实验平台测试 30

5.1 仿真验证 30

5.1.1 仿真主电路的搭建 30

5.1.2 仿真结果 30

5.2 实验平台测试 33

5.2.1 实验平台介绍 33

5.2.2 对比实验 34

5.2.3 实验结果叙述分析 38

总结与展望 40

参考文献 42

致 谢 44

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