论文总字数：20582字

摘 要

在21世纪的当下，随着各行业模块化的发展趋势，工业结构的革新趋向小而精，机器的集成度越来越高，微细结构深入产品的制造过程中，人们开始更加关注细微加工的研究。近些年来，航空航天，汽车和医疗器械领域的高新技术蓬勃发展，伴随电解加工技术的进一步研究，高尖技术和新兴科技的发展，一改以往电解加工技术的精度不高的问题，也让细微电解加工的研究更具现实发展意义。电解加工主要针对一些具有加工难度的金属物质（如回火钢、硬度较大合金等），这些金属有着超高的硬度和强度，还有较强的韧性，且多为薄壁零件。需要表面加工和形状尺寸加工后无机械切削力，无残余应力，无毛刺。

掩模电解加工是针对微细结构有效的特种加工方式，加工原理主要利用金属阳极的化学溶解成型。主要应用在金属阵列结构中，例如在阵列群孔类结构或者阵列微槽类的结构，加工难点在特征结构数量大，排列密集，加工精度高。难加工金属材料加工密度大，加工后易出现加工缺陷。加工过程掩模电解加工技术存在流场流速不稳定，流速不均匀，从而造成加工件的工艺不一致，加工精度不过关的情况。

掩模电解加工大都采用装夹装置对加工区域进行固定和定位，使用装夹装置容易增加电解液电解物排出过程操作难度、电解液流场的不稳定，电解液经过阳极过程会存在间隙，这给我们设计掩膜电解加工提出了一定的要求，所以本文针对大面积群孔加工过程中，提出蛇形流道掩模电解加工技术，通过设计合理的直流道与弯道的组合，用长窄流道代替宽流道作为加工流道，从而提高流场稳定性。

1.提出一种新型的掩模电解加工流道—蛇形流道，通过把过宽的流道分割成若干窄流道，并通过弯道相连，组成一个整体从而提高加工效率和增加阵列群孔的位置精度；

2.对大面积群孔掩模电解加工中的流场问题，进行理论分析，以获得合理的流场设计、合适的电解液流速以及稳定的加工环境；并通过模拟仿真研究对流场的加工特性进行验证分析。

关键词：蛇形流道；流场；阵列群孔

The Design of Electrode Machining Serpentine Flow Channel

ABSTRACT

In the 21st century, with the development trend of modularization in various industries, the innovation of industrial structure tends to be small and precise, the integration of machines is getting higher and higher, and the fine structure is deep into the product manufacturing process. the study. In recent years, high and new technologies in the aerospace, automotive and medical device fields have developed vigorously. With the further research of electrolytic processing technology, the development of high-tech and emerging technologies, the problem of low accuracy of electrolytic processing technology has been changed. The research of micro-electrolytic machining has more practical development significance. Electrolytic machining is mainly aimed at some metal substances that are difficult to process (such as tempered steel, alloys with greater hardness, etc.). These metals have ultra-high hardness and strength, as well as strong toughness, and are mostly thin-walled parts. No mechanical cutting force, no residual stress, and no burrs are required after surface processing and shape and size processing.

Mask electrolytic machining is a machining method that uses the principle of electrochemical anode dissolution of metal in the electrolyte to corrode and shape the material. Mainly used in metal array structures, such as array group hole structure or array micro-groove structure, the processing difficulty is that the number of feature structures is large, the arrangement is dense, and the processing accuracy is high. Difficult-to-process metal materials have high processing density and are prone to processing defects after processing. In the process of mask electrolytic machining, there is a situation where the flow velocity of the flow field is unstable and the flow velocity is not uniform, which results in the inconsistent process of the processed parts and the processing accuracy is not close.

Most of the electrolytic processing of masks use a clamping device to fix and position the processing area. The use of the clamping device is easy to increase the difficulty of the operation of the electrolyte electrolyte discharge process and the instability of the electrolyte flow field. There will be gaps in the electrolyte through the anode process. Certain requirements are required for the design of mask electrolytic processing. Therefore, in this paper, for the processing of large-area group holes, the serpentine flow channel mask electrolytic processing technology is proposed. By designing a reasonable combination of DC channels and curved channels, the length is narrow The flow channel replaces the wide flow channel as a processing flow channel, thereby improving the stability of the flow field.

A new type of template electrolytic machining flow channel-serpentine flow channel is proposed. By dividing the excessively wide flow channel into several narrow flow channels and connected by curved channels, a whole is formed to improve the processing efficiency and increase the array group Hole position accuracy;

Establish a serpentine flow channel. Use COMSOL simulation software for simulation. Theoretically analyze the flow field problem in large area group hole mask electrolytic machining to obtain reasonable flow field design, suitable electrolyte flow rate and stable processing environment; and study the processing characteristics of flow field through simulation Verification analysis.

Keywords: serpentine flow channel; flow field; array of group holes;

目录

摘要 1

The Design of Electrode Machining Serpentine Flow Channel 2

ABSTRACT 2

第一章 绪论 4

1.1课题背景 4

1.2微小群孔的应用现状 5

1.3微小群孔的加工现状 5

1.3.1微细机械加工技术 5

1.3.2激光加工技术 6

1.3.3电火花加工技术 6

图1.3.3 电火花加工微结构 7

1.3.4 电射流加工技术 7

1.3.5 掩模电解加工技术 7

1.4课题研究的意义 8

第二章 掩模电解加工蛇形流道的基本原理和研究方案 10

2.1基本原理 10

2.2影响加工精度的各类因素 11

2.2.1 电解液流场加工稳定性对加工精度的影响 11

2.2.2 电解液流场流速对加工精度的影响 11

2.2.3 电解液流场压力对加工精度的影响 11

2.3电解加工工艺系统 11

2.3.1 电解加工机床主体 11

2.3.2电解液 12

2.3.3电解液循环系统 12

2.3.4 电解加工电源 12

2.3.5 电解夹具设计 12

2.4仿真方案的介绍 13

仿真方案的COMSOL 数学模型 14

第三章 掩模电解加工蛇形流道的设计和仿真 15

3.1蛇形流道的仿真结果设计 16

3.1.1 对流场的分析 16

3.2蛇形流场导流装置的设计 18

3.3蛇形流场导流装置的优化分析 20

3.4总结 25

第四章 总结与经济型分析 27

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